In the semiconductor and electronics industries, ultra-high-purity water (UPW) is the lifeblood of our processes. As a process engineer with over 15 years at KOSA Medical, I've seen firsthand the critical role that liquid filtration plays in maintaining the cleanliness required for these high-purity applications. Our focus has always been on delivering reliable, high-performance filtration solutions that meet the stringent standards of these industries, including SEMI F57/F72 and ASME BPE 2019.
Understanding Ultrapure Water (UPW) Requirements
In semiconductor manufacturing, particle and ionic contamination can significantly impact yield and device performance. UPW must meet strict specifications for particle count, ionic contamination, and microbial levels. For instance, particle contamination in UPW must be <10 particles/mL at 0.05 µm and <2 particles/mL at 0.1 µm, according to SEMI F63.
Ionic contamination is equally critical. Contaminants like sodium, chloride, and ammonia can adversely affect semiconductor processes. UPW systems must achieve <1 ppb extractables to minimize ionic contamination. This level of purity is essential for maintaining the high yields and performance that these industries demand.
Filter Housing Design and Materials
Our filter housings are designed with sub-micron filtration in mind. We use 316L stainless steel, which is highly resistant to corrosion and ensures long-term reliability. The housings are designed to meet ASME BPE 2019 and 3-A Sanitary Standard 2022, ensuring they are suitable for high-purity applications.
For gasket materials, we offer options like FEP, EPDM, and silicone, each with its own advantages. FEP is ideal for high-temperature applications, while EPDM and silicone offer excellent chemical resistance.
| Material | Temperature Range (°C) | Chemical Resistance |
|---|---|---|
| FEP | 20 to 200 | Excellent against strong acids and bases |
| EPDM | -40 to 150 | Excellent against polar solvents and acids |
| Silicone | -55 to 200 | Excellent against steam and hot water |
Our housings are designed for easy maintenance and minimal downtime. Quick-change cartridges and in-place cleaning capabilities ensure that your filtration system remains operational with minimal interruption.
Cartridge and Membrane Systems
We offer a range of cartridges and membrane systems designed for sub-micron filtration. Our 0.2 µm absolute-rated cartridges are a popular choice for UPW systems, providing reliable filtration while minimizing pressure drop.
The membranes are designed for >99.9% recovery, ensuring that valuable UPW is not wasted. This high recovery rate is crucial for maintaining the efficiency of your UPW system and reducing operational costs.
Validation and Compliance
Validation is a critical aspect of any filtration system. Our systems are designed to meet the validation requirements of SEMI F57 and F72. We provide detailed validation protocols and support to ensure that your filtration system meets all necessary standards.
A semiconductor fab was experiencing particulate contamination issues that were affecting their yield. We worked with them to implement our 0.2 µm absolute-rated cartridges and membrane systems. Within weeks, they saw a significant reduction in particle contamination, leading to improved yield and reduced downtime.
Customization and Application-Specific Solutions
Every application is unique, and we understand that a one-size-fits-all approach doesn't work in high-purity industries. That's why we offer customizable solutions tailored to your specific needs. Whether you need a custom housing design, a specific cartridge rating, or a unique validation protocol, we can work with you to deliver a solution that meets your requirements.
We also offer a range of accessories to enhance the performance and reliability of your filtration system. From pressure gauges to flow meters, we have the tools you need to monitor and control your filtration process.
- Pressure gauges for monitoring system pressure
- Flow meters for accurate flow control
- Automatic valve systems for easy operation
Our application engineers are always available to discuss your specific needs and provide guidance on the best filtration solutions for your application. Contact us to explore how our liquid filtration products can meet your ultra-high-purity requirements.
Maintenance and Support
Regular maintenance is crucial for ensuring the long-term performance of your filtration system. We provide comprehensive maintenance services, including regular inspections, cartridge replacements, and system cleaning. Our team of experts is always available to provide support and ensure that your filtration system remains operational.
We also offer training programs to educate your staff on the proper use and maintenance of our filtration systems. This ensures that your team is equipped to handle any issues that may arise and keep your filtration system running smoothly.
If you're facing challenges with UPW cleanliness, I invite you to discuss your application with our experienced application engineers. We're here to help you find the right filtration solution for your specific needs.
Related product silos: LIQUID FILTRATION.